- Overview
- Quick Detail
- Description
- Application Areas
- Specifications
- Competitive Advantage
- FAQ
- Recommended Products
Overview
Place of Origin: |
USA |
Brand Name: |
VARIAN |
Model Number: |
VME1-2 04-719030-01 |
Packaging Details: |
Original new Factory Sealed |
Delivery Time: |
5-7 days |
Payment Terms: |
T/T |
Supply Ability: |
In stock |
Quick Detail
|
Valve Fitting Port |
Push-in fitting for pipe diam. 4 and M5 (axial or side) |
|
Fluid |
Filtered air without lubrication; lubrication, if used, must be continuous |
|
Type |
With poppet |
|
Versions |
Mechanical and manual |
|
Operators |
Mechanical; Plunger; Plunger for wall-mounting; Roller lever; Unidirectional roller lever |
|
Operating Pressure |
0.5–10 bar |
|
Operating Temperature Range |
-10° to +60°C |
|
Nominal Diameter |
2.5 mm |
Description
The Varian VME1-2 04-719030-01 Controller Board is designed for semiconductor wafer processing equipment, including CVD and Etch systems. The VME1-2 04-719030-01 manages digital signals between sensors, actuators, and processing modules using standard VMEbus architecture. It controls mechanical and manual valve operators, including plungers and roller levers, with flow rates up to 60 Nl/min and actuation force of 8 N at 6 bar. Operating across -10° to +60°C, the VME1-2 04-719030-01 interfaces with push-in fittings for pipe diameters 4 mm and M5, supporting installation in any position. Conductance of 16.5 Nl/min and critical ratio 0.03 bar/bar allow precise fluid actuation. The VME1-2 04-719030-01 ensures accurate signal routing for automated process control, enabling reliable operation of CVD deposition layers, etching sequences, and integrated actuator management in semiconductor production lines.
Application Areas
Specifically designed for semiconductor wafer processing equipment used by Applied Materials, including CVD (Chemical Vapor Deposition) and Etch (Etching) systems.
Function
Hardware Architecture: Based on the standard VMEbus industrial bus standard, typically installed within the mainframe of the equipment.
Functional Role: This board operates as a CPU or system controller, coordinating digital signal exchange between various processing modules, sensors, and actuators.
Specifications
|
Conductance C |
16.5 Nl/min |
|
Critical Ratio b |
0.03 bar/bar |
|
Flow Rate at 6 Bar / P 0.5 Bar |
35 Nl/min |
|
Flow Rate at 6 Bar / P 1 Bar |
60 Nl/min |
|
Actuation Force - Plunger at 6 Bar |
8 N |
|
Recommended Lubricant |
ISO and UNI FD 22 |
|
Installation |
In any position |
|
Compatibility with Oils |
Refer to page 6.1/08 |
Competitive Advantage
High-Speed VMEbus Coordination
The Varian VME1-2 04-719030-01 utilizes VMEbus industrial standard architecture to exchange digital signals between multiple modules, improving control response for high-speed CVD and Etch processes.
Precise Valve Control
With conductance of 16.5 Nl/min and critical ratio 0.03 bar/bar, the VME1-2 04-719030-01 manages valve actuation accurately, enabling controlled fluid flow in semiconductor processing systems.
Versatile Mechanical Actuation Support
The VME1-2 04-719030-01 supports mechanical and manual operators including plungers, roller levers, and unidirectional roller levers, giving engineers flexible control options for different process modules.
Industrial-Grade Environmental Tolerance
The VME1-2 04-719030-01 operates reliably across -10° to +60°C with filtered air as the working fluid, allowing continuous operation in semiconductor fab conditions.
FAQ
What is the VARIAN VME1-2 04-719030-01?
It is a Controller Board.
Is this product brand new?
Yes, VARIAN VME1-2 04-719030-01 is brand new, original, unused, and factory sealed
Do you have it in stock?
Yes, right now we have VARIAN VME1-2 04-719030-01 in stock ready for shipment, we can support video inspection.
Why can't I see a price for this VME1-2 04-719030-01?
In addition to "new original" " units.
we also specialize in the selling "discontinued" and hard to find industrial automation parts which tend to have a fluctuating market value. These fluctuations may make it difficult for us to provide accurate daily prices for parts on our website. Therefore, in an effort to ensure that we always provide you with the best and most accurate price available, our team will source and price your part on an enquiry-by-enquiry basis.
Do you provide warranty as standard?
We provide a full 12-month warranty for the VME1-2 04-719030-01. So, if you have any problems within 12 months from the date of delivery, then you can contact our Team who will be happy to help and explain what your next steps should be.